Simulation of a magnetic trap for a magnetron sputtering system (MPS) using the finite element method using the PYTHON language module

The modeling of a magnetic trap using pyFEMMis considered in order to select it for the design of a laboratory stand with magnetron sputtering in the form of a magnetron sputtering system with a flat cathode. This method of application was not chosen by chance, because it is more practical due to its speed of spraying thin metal films onto the substrate than a diode spray system. A magnetic trap for MSS is a subsystem whose magnetic fields are capable of holding plasma near the target. Using the developed program allows you to select the necessary trap from the proposed magnets without using additional formulas outside the calculation program, which simplifies and speeds up the search for the final system. The selection is based on the study of the graphs of the modules of tangential and normal components of magnetic induction, followed by the determination of the width of the sputtering zone, the extremes of each component of magnetic induction. The results obtained are compared with the specified tolerances and limitations. The result of the work was to obtain the necessary parameters of thirty-six subsystems of three different configurations, the dependence of the characteristics on the thickness of the magnetic core when it was added to the MSS and the relationship of the indicators on the multiplicity of magnets in the magnetic trap. In the conclusion of the article, the regularities of changes in various trap criteria depending on the configuration are formulated, the efficiency of increasing the number of magnets in the system and the thickness of the magnetic core is compared, the optimal subsystem of the proposed ones is determined.

Authors: F. S. Fedotov, A. M. Telegin

Direction: Electrical Engineering

Keywords: MSS, magnet trap, magnet-cylinder, magnet-ring

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