Peculiarities of the emission spectrums of the magnetron discharge with a metal target in argon atmosphere

In this work we studied the direct current discharges in argon of magnetrons with metal targets. The study was performed using the emission spectrums of the discharge. It was found that when increasing the discharge current in the range of 0.5…6 A, the intensity changes of metal and argon lines have an exponential character. However, if the intensity of metal lines is approximated by an exponential with a positive exponent, then argon lines are characterized by a saturation exponential. The parameters of the approximating functions depend on the argon pressure in the form of polynomials of the first order. The above features were found when studying the magnetron discharge with copper, titanium, and molybdenum targets.

Authors: N. M. Ivanov, V. I. Shapovalov

Direction: Physics

Keywords: reactive magnetron sputtering, thermochromism, tungsten oxide, vacuum annealing

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