INVESTIGATION OF THE INFLUENCE OF ETCH PROCESS UPON THE MORPHOLOGY OF THE POROUS SILICON PARTICLES

The properties of porous silicon for application in biomedicine are considered. Porous silicon powders were obtained by electrochemical anodic etching. The impact of technological parameters of the etch process upon the morphology of the particles are studied by means of scanning electron microscopy and dynamic light scattering method.

Authors: K. A. Bespalova, A. O. Belorus, L. V. Shaidarov, A. V. Tretakov

Direction: Physical Electronics and Technologies of Micro- and Nanostructures

Keywords: Porous nanomaterials, porous silicon, nanopowders, biomedicine, electrochemical etching, targeted drugs delivery

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