PHASE ANALYSIS OF THIN FERROELECTRIC Pb(Zr, Ti)O3 FILMS BY THE METHOD OF ELECTRON BACKSCATTER DIFFRACTION

By the method of electron backscatter diffraction the investigation of phase composition of the ferroelectric thin films of lead zirconate titanate (PZT), formed by two-stage technology (RF magnetron sputtering of ceramic targets and subsequent hightemperature annealing), depending on process conditions and temperature of heat treatment is carried out. It revealed the coexistence of two crystalline phases – monoclinic and tetragonal, and their correlation with different annealing temperatures.

Authors: V. P. Pronin, A. G. Kanareykin, I. P. Pronin, E. Yu. Kaptelov, S. V. Senkevich, V. T. Barchenko, D. K. Kostrin

Direction: Physical Phenomena in a Solid Body, Liquids and Gases

Keywords: Thin film PZT, electron backscatter diffraction, morphotropic phase boundary, monoclinic phase

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