RESEARCH OF LIMIT RESIDUAL PRESSURE OF THE VACUUM PUMPS USED IN PRODUCTION OF ELECTRONIC DEVICES

Experimental dependences of receiving vacuum are achieved and values of limit residual pressure of the oil-free spiral vacuum pump are defined. Dependences of limit residual pressure on the frequency of rotation of a spiral are described. It is shown that the pump operating time recommended in GOST P54807–2011 for fixing of residual pressure isn't enough that is connected with long processes of outgassing and transition of the pump to the stationary mode, including thermal stabilization of gaps and internal overflowings.

Authors: S. I. Salikeev, A. V. Burmistrov, A. V. Tyurin, S. M. Pyzankov

Direction: Physical Electronics and Technologies of Micro- and Nanostructures

Keywords: Spiral vacuum pump, residual pressure, outgassing, thermal stabilization

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