SIMULATION OF INORGANIC GLASSY DIELECTRIC LASER PROCESSING
The methodology of research of inorganic glassy dielectric laser treatment for microsystem technology by use of progressive methods of numerical modeling, in particular finite element method is described in this article. Model of laser treatment of glassy dielectric was developed. It allows analyzing the temperature distribution on the surface of borosilicate glass with different laser scanning velocity. ANSYS software was used for simulation of laser treatment process.
Authors: S. P. Malyukov, Yu. V. Klunnikova, T. H. Bui
Direction: Physical Phenomena in a Solid Body, Liquids and Gases
Keywords: Inorganic glassy dielectric, laser treatment, numerical simulation
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