METHODS OF INCREASING SENSITIVITY OF BACK-SIDE CHARGE-COUPLED DEVICES
Describes the basic methods of sensitizing the photosensitive surface of charge-coupled devices with the light from the substrate side (back-thinned or back-side charge coupled devices – BTCCD). Discussed in detail are the advantages and disadvantages of each method allowing the technology of BTCCD.
Authors: E. G. Lobanova
Direction: Physics Solid Body and Electronics
Keywords: Back-thinned charge coupled device, sensibilization, chemical adsorption, ion doping, laser annealing, molecular beam epitaxy
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