RESEARCH OF MATERIALS LASER PROCESSING FOR MICROELECTRONICS

The research of laser radiation interaction with the substance is one of the actual directions of science and equipment. The complex of laser equipment «LIMO» (Germany) allows carrying out a wide range of researches in the field of laser radiation impact on objects. The choice of laser power and radiation time is presented. Research was made in the Scientific and Educational Center «Laser Technologies» of the Nanotechnology, Electronics and Equipment Construction Institute of the Southern Federal University and at the Zelinsky Institute of Organic Chemistry by the Russian Academy of Sciences (Moscow).

Authors: S. P. Malyukov, Yu. V. Klunnikova, A. V. Sayenko

Direction: Physics Solid Body and Electronics

Keywords: Laser technologies, electronic microscopy, sapphire monocrystals, infrared range

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