THE USE OF QUARTZ PACKAGING FOR ENCAPSULATION OF MICROMECHANICAL ACCELEROMETERS ON SURFACE ACOUSTIC WAVES

The use of technology of quartz packaging for improving of characteristics of micromechanical accelerometers (MMA) on surface acoustic waves (SAW) is considered. The possibility of the laser frequency trimming of SAW- resonator in a sealed device and simultaneous application of resonator structures on the opposite side of the console with the help of system of high-precision laser marking is investigated.

Authors: D. P. Lukyanov, S. Yu. Shevchenko, E. P. Filippova, A. S. Kukaev, D. V. Safronov, A. V. Ivanov

Direction: Instrument Engineering and Information Technology

Keywords: Quartz packaging, surface acoustic wave (SAW), micromechanical accelerometer (MMA), laser frequency trimming

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