Analysis of diamond-like carbon coatings obtained by pulsed magnetron sputtering

The formation of amorphous diamond-like carbon coatings and the content of the sp³-hybrid carbon fraction in diamond-like carbon (DLC) films using the method of ion-plasma sputtering of a graphite target is analyzed. The results obtained are compared with those of coating of silicon samples with aluminum oxide by high-powered pulsed magnetron sputtering of constant power under different modes in a vacuum chamber. The structure of the resultant coatings is studied using scanning tunneling microscopy and spectroscopy. A strong dependence of the mechanical characteristics of carbon coatings on the main parameters that determine the deposition modes is established.

Authors: Myo Thi Ha, Liu Haoze, Li Chongcong, L. L. Kolesnik

Direction: Physics

Keywords: diamond-like carbon coating, high-power impulse magnetron sputtering (HiPIMS), sp², sp³ hybridization, high and ultra-high vacuum, discharge voltage, graphite

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