Investigation of the influence of elemental composition of Al–Si–N coatings system on their mechanical and optical properties

The regularities of formation of nanocomposite structures Si₃N₄–AIN and Al_1–xSi_xN solid solutions in the state diagram of the Al–Si–N coating system were considered. A literature review on determining the elemental composition of Al–Si–N coatings system with excellent mechanical and optical properties was presented. The obtained data on transparent hardening coatings of Al–Si–N system were compared with the state diagram. The concentration range of the coating composition for experiment with the aim of reproducibly obtaining high-quality Al–Si–N coatings with specified strength and transparency were determined.

Authors: U Shasha, S. P. Bychkov

Direction: Physics

Keywords: state diagram, Al–Si–N system coatings, nanocomposite structure, solid solution Al_1–xSi_xN

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