THE EFFECT OF CONSTRUCTION OF THE CATHODE IMPLANTER FOR LONG AND CHARGE COMPOSITION OF THE ION BEAM

In article it is shown that applying various designs of composite cathodes with elements with a large difference in atomic weights, and by controlling the time of arcing and thereby adjusting the quantitative ratio between the implanted ions, it is possible to ensure uniform doping of the target at a considerable depth.

Authors: E. V. Krylova, V. V. Ovchinnikov

Direction: Physical Electronics and Technologies of Micro- and Nanostructures

Keywords: Cathode, implanter, ion implantation, multicomponent bunches, variety of ions, the charge of ions

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