SURFACE ACOUSTIC WAVES PROPAGATION IN THE CASE OF MULTILAYER DIELECTRIC STRUCTURES WITH METALLIZED INTEFACE
We solved the problem of propagation of surface acoustic wave (SAW) along a multilayer piezoelectric/dielectric structure, which consist of N layers located on a semi-infinite substrate with metallic borders. Calculation for the silicon oxide layer on quartz ST-X cut is presented. With a thickness of about 0.1h/ electromechanical coupling coefficient remain stable and equal to 0.033%.
Authors: A. T. Galisultanov, A. V. Osetrov
Direction: Instrument Engineering and Information Technology
Keywords: SAW velocity, coupling, multilayer structure, ST quartz, SiO2
View full article